HEMEMS - Analysis of MEMS for Harsh Environment

Publication Date	December 2004
Publisher	Yole Développement
Product Type	Report
Pages
ISBN Number	not applicable
Product Code	YOL00042

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Summary

This report from Glennan Microsystems Inc. & Yole Dveloppement describes new developments and market opportunities for MEMS in harsh environments.

until recently, MEMS devices were limited to standard environment use (T < 150 C, non-aggressive chemical exposure, con-trolled pressure, e.g.). Now, expanded ap-plications are possible using new materials such as silicon carbide (SiC) or Silicon-on-Insulator (SOI). Compatible with stan-dard MEMS processes, SiC or SOI devices offer improved performance.

Content

Content of the report
Overview of generic MEMS technologies and markets
- What are MEMS ?
- Mems industrial infrastructure
Today applications and future market forecasts of Mems in harsh environments:
- Aeronautics
- Aerospace
- Defense
- Oil drilling industry
- Automotive industry
- Industrial applications
Technology status and major development
- Overview of Mems technologies
- Silicon, polymer and glass flow chart
- Mems markets
- Technology already on the market
- New development foreseen
- Major bottleneck and challenges
Description of the key players worldwide
- North America
- Europe
- Asia
Major R&D projects