MEMSonIC - Analysis of MEMS integration on IC

Publication Date	November 2004
Publisher	Yole Développement
Product Type	Report
Pages
ISBN Number	not applicable
Product Code	YOL00043

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Summary

QinetiQ and Yole Dveloppement have edited a new report describing the current applications, market and technology trends for integrated MEMS. The MEMS business is currently under strong re-organization. since the past years, there has been a strong involvement of IC manufacturers to find new opportunities in the MEMS business, especially for large volume market like

Automotive with inertial MEMS,
IT with micro-mirrors
Telecommunications with RF MEMS

Content

Introduction
The MEMS definition
From MEMS to microsystems
Why MEMS-on-IC process
Monolithic vs. hybrid
Stakes of IC and MEMS integration
Main advantages
Cost analysis
Major bottlenecks
Comparison of process lines
Sacrificial surface micromachining
SOI HARM
Traditional bulk micromachining
MEMS process insertion
Supply chain for monolithic microsystems
Key differences between MEMS and IC lines
Technology analysis - who is doing what
Players involved in integrated MEMS today
Presentation of four processes:
SUMMiT from Sandia National Lab
iMEMS from Analog Devices
DMD process from Texas Instruments
INTEGRAM from QinetiQ
Description of the applications in term of use of the MEMS devices integrated on IC process
Focus on industrial integrated MEMS devices for automotive and IT markets
Accelerometers
Gyroscopes
Pressure sensors
DMD
Integrated MEMS in development: RF MEMS
Market evaluation per applications (2003 - 2007)
Hypothesis
2002-2007 total MEMS markets
MEMS market issues
2002-2007 integrated MEMS markets
IC and MEMS integration - An emerging synergy of the MEMS and IC industries
The TOP 30 MEMS manufacturers in 2004
The different business models
Conclusions
Annexes
Company profiles