Atomic Layer Deposition and other Ultrathin-Film Fabrication Processes

Atomic Layer Deposition and other Ultrathin-Film Fabrication Processes

Report ID: 4397412
"The global market for atomic layer deposition and other ultrathin film fabrication processes was valued at $1.1 billion and $1.3 billion in 2014 and 2015, respectively. This market is expected to increase from $1.5 billion in 2016 to nearly $3.7 billion in 2021 at a compound annual growth rate (CAGR) of 19.1% for 2016-2021.


Use this report to:

- Receive information about most advanced processes employed for the fabrication of ultrathin films.
- Analyze new technological developments in the fabrication of ultrathin films, while outlining technical issues.
- Identify important technology and industry trends within each market segment.
- Learn about the most relevant research and development activities.


Highlights

- The global market for atomic layer deposition and other ultrathin film fabrication processes was valued at $1.1 billion and $1.3 billion in 2014 and 2015, respectively. This market is expected to increase from $1.5 billion in 2016 to nearly $3.7 billion in 2021 at a compound annual growth rate (CAGR) of 19.1% for 2016-2021.
- Atomic layer deposition process market is expected to grow from $694 million in 2016 to nearly $2.0 billion in 2021 at a CAGR of 23.3% from 2016 through 2021.
- Liquid phase methods process market is expected to grow from $473 million in 2016 to nearly $1.1 billion at a CAGR of 17.6% from 2016 through 2021.


STUDY GOALS AND OBJECTIVES

Atomic layer deposition (ALD) is a relatively new thin film deposition technology invented in Finland in 1974. For many years this method has been mainly used for R&D purposes, primarily due to its low deposition rate. However, since the year 2000, ALD has gained renewed commercial interest in both microelectronics and nanotechnology for the manufacturing of films with thickness measurable in nanometers, in particular ultrathin films (below 30 nm in thickness).
BCC Research published its first report on atomic layer deposition in March 2006. During the last ten years, the ALD market for ALD materials and equipment has evolved, new technological developments have occurred in the field, and industry changes have taken place. In addition, other processes are emerging for deposition of ultrathin films, to meet the requirements associated with device miniaturization in multiple industry sectors, ranging from electronics and optoelectronics to life sciences and sensors and instrumentation.

With this study, BCC Research continues its commitment to monitoring the ALD market and expands its evaluation to also cover alternative technologies. The main goal is to provide an updated review of the most important advances in ultrathin film deposition technology, including recent significant research activities. In addition, a detailed overview of the current market for ultrathin film deposition equipment (UTFE) is offered together with an objective analysis of industry and technological trends, and prospects for future growth.


Specifically, the major objectives of this study are to:

- Provide an update on the most advanced processes employed for the fabrication of ultrathin films.
- Highlight new technological developments in the fabrication of ultrathin films, while outlining technical issues.
- Review existing fields of application for ultrathin films, and investigate emerging applications.
- Estimate current global UTFE markets by process, application, and region, with growth forecasts through 2021 for each market segment.
- Identify important technology and industry trends within each market segment.
- Supply an updated review of current industry players, including manufacturers of UTFE, materials for ultrathin film deposition, technology developers and future market participants.
- Provide a description of the most relevant research and development activities.
- Determine trends in recently issued U.S. patents.



REASONS FOR DOING THIS STUDY

Thin films are typically defined as films with a thickness below 5 microns. With the advent of nanotechnology, there has been growing adoption of processes for fabrication of nanofilms (films with a thickness below 100 nm) and more recently increasing miniaturization has evolved toward the use of ultrathin film (films with a thickness below 30 nm).

ALD is currently the most popular method for producing ultrathin films. In 2005, the year prior to BCC Research’s first published report on atomic layer deposition, the ALD market was quite small and valued at only $214 million worldwide; however, the global ALD market has grown steadily since then, with a CAGR greater than 15% during the last 10 years.

In addition, other processes for deposition of ultrathin films have become available, and are gaining interest for production of a variety of films with different functionalities. The principal reason for doing this study is to present a current assessment of the ultrathin film deposition industry from both a technological and market point of view and to outline future trends and key developments. There is also a need to evaluate the current status and future trends of the UTFE market from a global standpoint. As use of ultrathin films expands and new fields of application emerge, information on the suppliers and developers of UTFE and their regional distribution becomes more valuable.

An equally important reason for undertaking this study is to provide technical insights into ultrathin film manufacturing by:
- Providing a review of ultrathin film applications and production methods.
- Identifying current technological trends.
- Providing an overview of the main global R&D activities related to ultrathin film deposition technology, resulting in the issuance of patents.
- Illustrating the latest technological developments.
- This information can assist companies in identifying opportunities for process and productivity improvements and new product development, resulting in a positive impact on future market growth.



INTENDED AUDIENCE

This study will be of primary interest to all organizations that:
- Manufacture, sell, and distribute ALD and other ultrathin film deposition equipment.
- Manufacture tools and parts utilized by UTFE producers.
- Produce devices based on ultrathin films.
- Offer thin film deposition and coating services.
- Manufacture processing and characterization equipment for the nano and ultrathin film industry.
- Provide technical and/or marketing services in conjunction with the above mentioned products.
- Are planning to enter the ultrathin film and nanotechnology industry as a supplier, manufacturer, service provider or end user.

Overall, this study applies to industry sectors such as electronics, optoelectronics, mechanical, chemical, energy, optics, medical, biological, dental, sensors and instrumentation, and nanotechnology.
The study is mainly directed toward executives, directors, operations managers, sales and marketing managers, and strategic planners working within the above industries. Universities and research facilities may also find this study to be a good source of technical information regarding ultrathin film technology, equipment, and applications, which can be used as a baseline for new or expanded R&D activities. Librarians of technical information and research centers can also use this report to provide critical data to product managers, market analysts, researchers and other professionals needing detailed and updated insights into the ultrathin film industry.



SCOPE OF REPORT

This report provides an updated review of atomic layer deposition and other ultrathin film deposition technologies, and identifies current and emerging applications for these technologies.
BCC Research delineates the current market status for ultrathin film deposition equipment, defines trends and presents growth forecasts for the next five years. The UTFE market is analyzed based on the following segments: process, application and region. In addition, technological issues, including key events and the latest process developments, are discussed.

More specifically, the market analysis conducted by BCC Research for this report is divided into five sections. In the first section, an introduction to the topic and a historical review of atomic layer deposition are provided, including an outline of recent events. In this section, current and emerging applications for ALD and other ultrathin film fabrication processes are also identified and grouped in segments (electronics, optoelectronics, mechanical/chemical, sensors and instrumentation, energy, optical coatings, life sciences, and others).

The second section provides a review of deposition technologies for ultrathin films. This section offers a revised and detailed description of various thin film coating processes; existing deposition methods for ultrathin films; and new and emerging fabrication processes. This section concludes with an analysis of the most important technological developments since 2013, including examples of significant patents recently issued or applied for, as well as highlighting the most active research organizations operating in this field.

The third section entails a global market analysis for UTFE. Global revenues (sales data in millions of dollars) are presented for each segment (process, application and region), with actual data referring to the years 2014 and 2015, and estimates for 2016. The analysis of current UTFE revenues is followed by a detailed presentation of market growth trends, based on industry growth, technological trends and regional trends. The third section concludes by providing projected UTFE revenues within each segment, together with forecast compound annual growth rates (CAGRs) for the period 2016 through 2021.

In the fourth section of the study, which covers global industry structure, the report offers a list of the leading suppliers of UTFE, together with a description of their products. The analysis includes a description of the geographical distribution of these firms and an evaluation of other key industry players. Detailed company profiles of the top players are also provided.

The fifth and final section includes an analysis of recently issued U.S. patents, with a summary of patents related to ultrathin film fabrication methods, equipment and applications. Patent analysis is performed by region, country, assignee, patent category, application and process type.


METHODOLOGY AND INFORMATION SOURCES

To analyze the overall market and market segments, both primary and secondary research methodologies were used to obtain market data. The technology section of this report is based on information derived from technical literature, related BCC Research reports, professional journals, the author’s field experience and online sources.

Global market analysis was performed by a thorough investigation of manufacturers of ultrathin film deposition equipment, producers of raw materials, and developers of new technologies, accounting for at least 95% of the global market. Data were obtained from the direct contribution of primary sources, including company executives, managers, engineers and other technical personnel representing manufacturers, developers and users of ultrathin film deposition equipment; representatives of academia and trade associations; and industry market analysts.

Additional data for each company were obtained by thoroughly analyzing Security and Exchange Commission (SEC) filings, websites, annual reports, industry directories, industry magazines and catalogs, government sources and other public sources.

Secondary sources of information include, but are not limited to:
- U.S. Securities and Exchange Commission Filings.
- U.S. Patent and Trademark Office.
- European Patent Office.
- Company websites.
- Company annual reports.
- Thomas Register.
- Moody’s Directory.
- S & P Industry Survey.
- Dun & Bradstreet Business Directory.
- Foreign chamber of commerce directories.
- Foreign stock exchange listings.
- American Ceramic Society publications.
- American Chemical Society publications.
In addition to utilizing the above primary and secondary sources, market growth trends and forecasts were compiled by gaining additional insights from relevant financial and market information, relevant BCC Research reports, and the author’s own in-depth and comprehensive analysis of the collected information.
TABLE OF CONTENTS
CHAPTER 1 INTRODUCTION 2
STUDY GOALS AND OBJECTIVES 2
REASONS FOR DOING THIS STUDY 3
INTENDED AUDIENCE 3
SCOPE OF REPORT 4
METHODOLOGY AND INFORMATION SOURCES 5
RELATED REPORTS 6
ANALYST'S CREDENTIALS 7
WEBSITE 8
DISCLAIMER 8
CHAPTER 2 EXECUTIVE SUMMARY 10
SUMMARY
TABLE GLOBAL ATOMIC LAYER DEPOSITION AND OTHER ULTRATHIN FILM FABRICATION PROCESSES MARKET, BY SEGMENT, THROUGH 2021 ($ MILLIONS) 11
SUMMARY FIGURE GLOBAL ATOMIC LAYER DEPOSITION AND OTHER ULTRATHIN FILM FABRICATION PROCESSES MARKET, BY SEGMENT, 2014-2021 ($ MILLIONS) 11
CHAPTER 3 OVERVIEW 13
THICK, THIN AND ULTRATHIN FILMS 13
DEFINITIONS 13
COST FACTOR AND MANUFACTURING PROCESSES 13
Technological and Market Trends in the Thin Film Industry 14
FIGURE 1 THIN FILM METHODS (EQUIPMENT, MATERIALS, SERVICES): GLOBAL MARKET SHARE BY GROUP OF TECHNOLOGIES, 2016 (%) 14
REVIEW OF THE HISTORY OF ATOMIC LAYER DEPOSITION AND RECENT EVENTS 15
TABLE 1 ATOMIC LAYER DEPOSITION: TECHNOLOGICAL MILESTONES 15
FIGURE 2 ATOMIC LAYER DEPOSITION: GLOBAL PATENT APPLICATIONS AND PATENTS ISSUED, 1990-2015 (NO. OF PATENTS/APPLICATIONS) 16
CURRENT AND EMERGING APPLICATIONS FOR ATOMIC LAYER DEPOSITION AND OTHER ULTRATHIN FILM FABRICATION PROCESSES 17
TABLE 2 APPLICATIONS FOR ULTRATHIN FILM PROCESSES, 2016 18 ELECTRONICS 19
Integrated Circuits 19
Passive Components 20
Embedded Components 20
Recording Heads 20
MEMS and NEMS 20
Rigid and Flexible Printed Circuits 21
TABLE 3 ULTRATHIN FILM APPLICATIONS IN ELECTRONICS, 2016 21
OPTOELECTRONICS 22
Advanced Displays 22
Solid-state Lighting 22
Other Optoelectronic Devices 22
TABLE 4 ULTRATHIN FILM APPLICATIONS IN OPTOELECTRONICS, 2016 23
MECHANICAL/CHEMICAL 23
Protective Coatings 23
Solid Lubricants 24
Membranes and Catalysts 24
Particle Coatings 24
TABLE 5 ULTRATHIN FILM APPLICATIONS IN THE MECHANICAL/ CHEMICAL SECTOR, 2016 24
SENSORS AND INSTRUMENTATION 25
Chemical, Physical and Optical Sensors 25
Biosensors 25
TABLE 6 ULTRATHIN FILM APPLICATIONS IN THE SENSORS AND INSTRUMENTATION
SECTOR, 2016 26
ENERGY 26
Photovoltaic Cells and Photothermal Devices 26
Thermoelectric Devices 26
High-Temperature Superconductors 27
Fuel Cells 27
Batteries 27
Supercapacitors 27
TABLE 7 ULTRATHIN FILM APPLICATIONS IN THE ENERGY SECTOR, 2016 27
OPTICAL COATINGS 28
Glass Coatings 28
Technical Coatings 28
TABLE 8 ULTRATHIN FILM APPLICATIONS IN THE OPTICAL COATINGS SECTOR, 2016 29
LIFE SCIENCES 29
Biocompatible Coatings 29
Other Coatings 29
TABLE 9 ULTRATHIN FILM APPLICATIONS IN LIFE SCIENCES, 2016 30
OTHERS 30
TABLE 10 OTHER ULTRATHIN FILM APPLICATIONS, 2016 30
CHAPTER 4 DEPOSITION TECHNOLOGIES FOR ULTRATHIN FILMS 32
INTRODUCTION 32
THIN FILM DEPOSITION PROCESSES 32
ADDITIVE METHODS 32
TABLE 11 THIN FILM PRINTING TECHNOLOGIES, 2016 33
SUBTRACTIVE METHODS 33
Coating Methods Used in Subtractive Processes 34
TABLE 12 THIN-FILM COATING TECHNOLOGIES, 2016 34
Physical Processes 38
Chemical Processes 38
Hybrid Processes 38
DEPOSITION TECHNOLOGIES FOR ULTRATHIN FILMS 38
TABLE 13 DEPOSITION TECHNOLOGIES FOR ULTRATHIN FILMS, 2016 39
TABLE 14 DEPOSITION TECHNOLOGIES FOR ULTRATHIN FILMS, 2016 40
ULTRA-HIGH VACUUM ELECTRON BEAM DEPOSITION 40
TABLE 15 THERMAL EVAPORATION: BASIC PROCESS STEPS 41
TABLE 16 ELECTRON BEAM EVAPORATION: BASIC PROCESS STEPS 41
MOLECULAR BEAM EPITAXY 42
TABLE 17 MOLECULAR BEAM EPITAXY: BASIC PROCESS STEPS 42
LASER ABLATION/PULSED LASER DEPOSITION 42
TABLE 18 LASER ABLATION/PLD: BASIC PROCESS STEPS 43
MAGNETRON SPUTTERING 43
TABLE 19 SPUTTERING: BASIC PROCESS STEPS 43
CHEMICAL VAPOR DEPOSITION 44
TABLE 20 CHEMICAL VAPOR DEPOSITION: BASIC PROCESS STEPS 44
Ultra-high Vacuum CVD 45
Plasma Enhanced CVD 45
Metal-Organic Chemical Vapor Deposition 45
TABLE 21 METAL-ORGANIC CVD: BASIC PROCESS STEPS 46
Nanolayer Deposition 46
Atomic Vapor Deposition 47
Atomic Layer Deposition 47
TABLE 22 ALD TECHNOLOGIES, 2016 48
CHEMICAL SOLUTION DEPOSITION 49
Basic Chemical Solution Deposition Technology 49
TABLE 23 CHEMICAL SOLUTION DEPOSITION: TYPICAL ROUTES 49
TABLE 24 CHEMICAL SOLUTION DEPOSITION: BASIC PROCESS STEPS 50
Spin Coating 50
Dip Coating 50
Spray Pyrolysis 50
Sol-gel 51
Polymeric Route 51
Colloidal Route 52
Other Sol-gel Routes 53
Organic-inorganic Hybrids 53
Metalorganic Deposition 53
Chelate Method 54
Nitrate Method 54
Citrate Method 54
Pechini Method 54
INTERFACIAL POLYMERIZATION 54
LANGMUIR-BLODGETT DEPOSITION 55
SELF-ASSEMBLED MONOLAYER DEPOSITION 55
LAYER-BY-LAYER ASSEMBLY 55
HIGH-SPEED ELECTROMAGNETIC VALVE DEPOSITION 56
ELECTROLESS DEPOSITION 56
SPRAY PYROLYSIS 56
ELECTROCHEMICAL GRAFTING 56
HYBRID PROCESSES 57
LATEST TECHNOLOGICAL DEVELOPMENTS, 2013 TO PRESENT 57
ATOMIC LAYER DEPOSITION 57
Roll-to-roll Atomic Layer Deposition 57
Ultraviolet-light-assisted ALD 57
Spatial Atomic Layer Deposition 58
Electron-enhanced Atomic Layer Deposition 59
High-throughput Atomic Layer Deposition 59
Combined Atomic Layer Etching/Atomic Layer Deposition Equipment 60
OTHER ULTRATHIN FILM DEPOSITION METHODS 60
Matrix Assisted Pulsed Laser Evaporation 60
Multiple Beam Pulsed Laser Deposition 61
Pulsed Electron Beam Deposition 62
OTHER RELEVANT R&D ACTIVITIES 63
TABLE 25 OTHER RELEVANT R &D ACTIVITIES 63
CHAPTER 5 GLOBAL MARKETS 66
ANALYSIS OUTLINE 66
GLOBAL MARKET SUMMARY 66
TABLE 26 GLOBAL ULTRATHIN FILM DEPOSITION MARKET, BY SEGMENT, THROUGH 2021 ($ MILLIONS) 67
FIGURE 3 GLOBAL ULTRATHIN FILM DEPOSITION TECHNOLOGIES MARKET, 2014-2021 ($ MILLIONS) 68
CURRENT MARKET STATUS 68 CURRENT MARKET SUMMARY 68
TABLE 27 GLOBAL THIN FILM PROCESSES MARKET, THROUGH 2016 ($ MILLIONS) 69
FIGURE 4 GLOBAL THIN FILM PROCESSES MARKET SHARE, BY MATERIAL, EQUIPMENT AND SERVICES, 2016 (%) 69
TABLE 28 GLOBAL THIN FILM EQUIPMENT MARKET, BY PROCESS, THROUGH 2016 ($ MILLIONS) 71
FIGURE 5 GLOBAL THIN FILM EQUIPMENT MARKET SHARE, BY PROCESS, 2016 (%) 71
UTFE Market by Process 71
TABLE 29 GLOBAL ULTRATHIN FILM EQUIPMENT MARKET, BY PROCESS, THROUGH 2016 ($ MILLIONS) 73
FIGURE 6 GLOBAL ULTRATHIN FILM EQUIPMENT MARKET SHARE, BY PROCESS, 2016 (%) 73
ALD Market by Equipment Type 74
TABLE 30 GLOBAL ALD EQUIPMENT MARKET, BY TYPE, THROUGH 2016 ($ MILLIONS) 75
FIGURE 7 GLOBAL ALD EQUIPMENT MARKET SHARE, BY TYPE, 2016 (%) 75
UTFE Market by Application 75
TABLE 31 GLOBAL ULTRATHIN FILM EQUIPMENT MARKET, BY APPLICATION AND EQUIPMENT TYPE, 2016 ($ MILLIONS) 76
FIGURE 8 GLOBAL ULTRATHIN FILM EQUIPMENT MARKET SHARE, BY APPLICATION, 2016 (%) 76
Revenues by Region 77
TABLE 32 GLOBAL ULTRATHIN FILM EQUIPMENT MARKET, BY REGION, THROUGH 2016 ($ MILLIONS) 78
FIGURE 9 GLOBAL ULTRATHIN FILM EQUIPMENT MARKET SHARE, BY REGION, 2016 (%) 78
MARKET GROWTH TRENDS 79
ELECTRONICS 79
Semiconductor Devices 79
TABLE 33 GLOBAL SEMICONDUCTORS MARKET, BY REGION, THROUGH 2021 ($ BILLIONS) 80
MEMS and NEMS 80
TABLE 34 GLOBAL MEMS AND NEMS MARKET, BY TYPE, THROUGH 2021 ($ BILLIONS) 80
Magnetic Storage Media and Recording Heads 81
Hard Disk Drives 81
TABLE 35 GLOBAL HARD DISK DRIVES PRODUCTION, BY TYPE, THROUGH 2021 (MILLION UNITS) 82
OPTOELECTRONICS 82
Advanced Displays 82
TABLE 36 GLOBAL ADVANCED DISPLAYS MARKET, BY TYPE, THROUGH 2021 ($ BILLIONS) 83
Lasers 83 Optical Waveguides 83
TABLE 37 GLOBAL OPTICAL FIBERS MARKET, THROUGH 2021 ($ MILLIONS/MILLIONS OF KILOMETERS) 84
Solid-state Lighting 84 SENSORS AND INSTRUMENTATION 84 Sensors 84
TABLE 38 GLOBAL SENSORS MARKET, BY TYPE, THROUGH 2021 ($ MILLIONS) 85
Biosensors and Gas Sensors 85
TABLE 39 FORECAST - BIOSENSORS AND OTHER COMMON SENSORS: GLOBAL REVENUES THROUGH 2021 ($ BILLIONS) 86
ENERGY 86 Photovoltaic Cells 86
TABLE 40 FORECAST - PHOTOVOLTAIC MODULES: GLOBAL PRODUCTION BY TYPE, THROUGH 2021 (MW) 87
Flexible Solar Cells 87
Photothermal Devices 87
Batteries 88 Fuel Cells 88
TABLE 41 FORECAST-FUEL CELLS: GLOBAL REVENUES BY TYPE, THROUGH 2021 ($ MILLIONS) 88
Thermoelectric Devices 89
LIFE SCIENCES 89
TABLE Devices 89
TABLE 42 FORECAST-IMPLAN TABLE DEVICES: REVENUES BY REGION, THROUGH 2021 ($ BILLIONS) 89
Medical Instruments 90
MECHANICAL/CHEMICAL 90
TABLE 43 FORECAST-WEAR AND CORROSION RESISTANT PARTS: GLOBAL REVENUES BY TYPE, THROUGH 2021 ($BILLIONS) 90
OTHER APPLICATIONS 90
TECHNOLOGICAL TRENDS 91
On-going Miniaturization in the Semiconductor Industry 91
Advent of Nanoelectronics and 2D Devices 91
FIGURE 10 FROM MICROELECTRONICS TO NANOELECTRONICS 92
Fast Growing Market for Transparent Electronics 92
Nanotechnology 92
TABLE 44 THE NANOTECHNOLOGY INDUSTRY, 2016 94
TABLE 45 GLOBAL NANOTECHNOLOGY MARKET, BY SEGMENT, THROUGH 2021 ($ BILLIONS) 96
FIGURE 11 GLOBAL NANOTECHNOLOGY MARKET SHARE, BY SEGMENT, 2021 (%) 96
Different Methods for a Variety of Applications 97
Atomic Layer Deposition 97
Liquid Phase Methods 98
Pulsed Laser Deposition 98
Molecular Beam Epitaxy 98
REGIONAL TRENDS 99
MARKET FORECAST 100
UTFE MARKET BY APPLICATION 100
TABLE 46 GLOBAL ULTRATHIN FILM EQUIPMENT MARKET, BY APPLICATION, THROUGH 2021 ($ MILLIONS) 101
FIGURE 12 GLOBAL ULTRATHIN FILM EQUIPMENT MARKET SHARE, BY APPLICATION, 2021 (%) 101
TABLE 47 FORECAST-ULTRATHIN FILM EQUIPMENT: GLOBAL REVENUES BY APPLICATION AND EQUIPMENT TYPE, 2021 ($ MILLIONS) 102
UTFE MARKET BY PROCESS 102
TABLE 48 FORECAST-ULTRATHIN FILM EQUIPMENT: GLOBAL REVENUES BY PROCESS, THROUGH 2021 ($ MILLIONS) 103
FIGURE 13 FORECAST - ULTRATHIN FILM EQUIPMENT: MARKET SHARE BY PROCESS, 2021 (%) 103
ALD Market by Equipment Type 104
TABLE 49 FORECAST-ALD EQUIPMENT: GLOBAL REVENUES BY TYPE, THROUGH 2021 ($ MILLIONS) 105
FIGURE 14 FORECAST-ALD EQUIPMENT MARKET SHARE, BY TYPE, 2021 (%) 105
UTFE MARKET BY REGION 105
TABLE 50 FORECAST-ULTRATHIN FILM EQUIPMENT: REVENUES, BY REGION, THROUGH 2021 ($ MILLIONS) 106
FIGURE 15 FORECAST-ULTRATHIN FILM EQUIPMENT: MARKET SHARE BY REGION, 2021 (%) 106
CHAPTER 6 GLOBAL INDUSTRY STRUCTURE 109
LEADING SUPPLIERS OF ULTRATHIN FILM DEPOSITION EQUIPMENT 109
TABLE 51 LEADING SUPPLIERS OF ULTRATHIN FILM DEPOSITION EQUIPMENT, 2016 109
TABLE 52 LEADING SUPPLIERS OF ULTRATHIN FILM DEPOSITION EQUIPMENT, BY TYPE, 2016 111
TABLE 53 LEADING SUPPLIERS OF ULTRATHIN FILM DEPOSITION EQUIPMENT, BY TYPE AND REGION, 2016 113
OTHER PLAYERS IN THE ULTRATHIN FILM INDUSTRY 114
TABLE 54 OTHER RELEVANT INDUSTRY PLAYERS, 2016 114
COMPANY PROFILES 117
AIXTRON 117
APEX INSTRUMENTS 118
APPLIED MATERIALS 119
ASM INTERNATIONAL 120
BENEQ 121
JUSUNG ENGINEERING 122
KURT J. LESKER 123
LAM RESEARCH 123
LJ UHV TECHNOLOGY 124
MEYER BURGER 125
NANO-MASTER 126
OXFORD INSTRUMENTS 126
PICOSUN 127
PVD PRODUCTS 128
SENTECH 129
TORR 129
TSST 130
ULTRATECH 130
VEECO INSTRUMENTS 131
WONIK IPS 132
CHAPTER 7 PATENT ANALYSIS 134
INTRODUCTION 134
SUMMARY OF RECENTLY AWARDED PATENTS 134
TABLE 55 ULTRATHIN FILM DEPOSITION PROCESSES: U.S. PATENTS, 2016 134 GENERAL TRENDS 147
TABLE 56 ULTRATHIN FILM FABRICATION PROCESSES: U.S. PATENT TRENDS, THROUGH 2016 147
FIGURE 16 ULTRATHIN FILM FABRICATION PROCESSES: U.S. PATENT TRENDS, 2014-2016 (NUMBER OF PATENTS) 147
TRENDS BY COUNTRY AND REGION 148
FIGURE 17 ULTRATHIN FILM FABRICATION PROCESSES: PATENT SHARE, BY REGION, 2016 (%) 149
FIGURE 18 ULTRATHIN FILM FABRICATION PROCESSES: PATENT SHARE, BY COUNTRY, 2016 (%) 149
TRENDS BY ASSIGNEE 150
TABLE 57 ASSIGNEES OF U.S. PATENTS RELATED TO ULTRATHIN FILM FABRICATION PROCESSES, 2015-2016 151
FIGURE 19 ULTRATHIN FILM FABRICATION PROCESSES: SHARES OF U.S. PATENTS BY ORGANIZATION TYPE, 2016 (%) 153
TRENDS BY PATENT CATEGORY 154
FIGURE 20 ULTRATHIN FILM FABRICATION PROCESSES: SHARES OF U.S. PATENTS BY CATEGORY, 2016 (%) 155
TRENDS BY APPLICATION 155
FIGURE 21 ULTRATHIN FILM FABRICATION PROCESSES: SHARES OF U.S. PATENTS, BY APPLICATION, 2016 (%) 157
TRENDS BY PROCESS TYPE 158
FIGURE 22 ULTRATHIN FILM FABRICATION PROCESSES: SHARES OF U.S. PATENTS, BY PROCESS TYPE, 2016 (%) 158


LIST OF TABLES

SUMMARY TABLE GLOBAL ATOMIC LAYER DEPOSITION AND OTHER ULTRATHIN FILM FABRICATION PROCESSES MARKET, BY SEGMENT, THROUGH 2021 ($ MILLIONS) 11
TABLE 1 ATOMIC LAYER DEPOSITION: TECHNOLOGICAL MILESTONES 15
TABLE 2 APPLICATIONS FOR ULTRATHIN FILM PROCESSES, 2016 18
TABLE 3 ULTRATHIN FILM APPLICATIONS IN ELECTRONICS, 2016 21
TABLE 4 ULTRATHIN FILM APPLICATIONS IN OPTOELECTRONICS, 2016 23
TABLE 5 ULTRATHIN FILM APPLICATIONS IN THE MECHANICAL/ CHEMICAL SECTOR, 2016 24
TABLE 6 ULTRATHIN FILM APPLICATIONS IN THE SENSORS AND INSTRUMENTATION SECTOR, 2016 26
TABLE 7 ULTRATHIN FILM APPLICATIONS IN THE ENERGY SECTOR, 2016 27
TABLE 8 ULTRATHIN FILM APPLICATIONS IN THE OPTICAL COATINGS SECTOR, 2016 29
TABLE 9 ULTRATHIN FILM APPLICATIONS IN LIFE SCIENCES, 2016 30
TABLE 10 OTHER ULTRATHIN FILM APPLICATIONS, 2016 30
TABLE 11 THIN FILM PRINTING TECHNOLOGIES, 2016 33
TABLE 12 THIN-FILM COATING TECHNOLOGIES, 2016 34
TABLE 13 DEPOSITION TECHNOLOGIES FOR ULTRATHIN FILMS, 2016 39
TABLE 14 DEPOSITION TECHNOLOGIES FOR ULTRATHIN FILMS, 2016 40
TABLE 15 THERMAL EVAPORATION: BASIC PROCESS STEPS 41
TABLE 16 ELECTRON BEAM EVAPORATION: BASIC PROCESS STEPS 41
TABLE 17 MOLECULAR BEAM EPITAXY: BASIC PROCESS STEPS 42
TABLE 18 LASER ABLATION/PLD: BASIC PROCESS STEPS 43
TABLE 19 SPUTTERING: BASIC PROCESS STEPS 43
TABLE 20 CHEMICAL VAPOR DEPOSITION: BASIC PROCESS STEPS 44
TABLE 21 METAL-ORGANIC CVD: BASIC PROCESS STEPS 46
TABLE 22 ALD TECHNOLOGIES, 2016 48
TABLE 23 CHEMICAL SOLUTION DEPOSITION: TYPICAL ROUTES 49
TABLE 24 CHEMICAL SOLUTION DEPOSITION: BASIC PROCESS STEPS 50
TABLE 25 OTHER RELEVANT R &D ACTIVITIES 63
TABLE 26 GLOBAL ULTRATHIN FILM DEPOSITION MARKET, BY SEGMENT, THROUGH 2021 ($ MILLIONS) 67
TABLE 27 GLOBAL THIN FILM PROCESSES MARKET, THROUGH 2016 ($ MILLIONS) 69
TABLE 28 GLOBAL THIN FILM EQUIPMENT MARKET, BY PROCESS, THROUGH 2016 ($ MILLIONS) 71
TABLE 29 GLOBAL ULTRATHIN FILM EQUIPMENT MARKET, BY PROCESS, THROUGH 2016 ($ MILLIONS) 73
TABLE 30 GLOBAL ALD EQUIPMENT MARKET, BY TYPE, THROUGH 2016 ($ MILLIONS) 75
TABLE 31 GLOBAL ULTRATHIN FILM EQUIPMENT MARKET, BY APPLICATION AND EQUIPMENT TYPE, 2016 ($ MILLIONS) 76
TABLE 32 GLOBAL ULTRATHIN FILM EQUIPMENT MARKET, BY REGION, THROUGH 2016 ($ MILLIONS) 78
TABLE 33 GLOBAL SEMICONDUCTORS MARKET, BY REGION, THROUGH 2021 ($ BILLIONS) 80
TABLE 34 GLOBAL MEMS AND NEMS MARKET, BY TYPE, THROUGH 2021 ($ BILLIONS) 80
TABLE 35 GLOBAL HARD DISK DRIVES PRODUCTION, BY TYPE, THROUGH 2021 (MILLION UNITS) 82
TABLE 36 GLOBAL ADVANCED DISPLAYS MARKET, BY TYPE, THROUGH 2021 ($ BILLIONS) 83
TABLE 37 GLOBAL OPTICAL FIBERS MARKET, THROUGH 2021 ($ MILLIONS/MILLIONS OF KILOMETERS) 84
TABLE 38 GLOBAL SENSORS MARKET, BY TYPE, THROUGH 2021 ($ MILLIONS) 85
TABLE 39 FORECAST - BIOSENSORS AND OTHER COMMON SENSORS: GLOBAL REVENUES THROUGH 2021 ($ BILLIONS) 86
TABLE 40 FORECAST - PHOTOVOLTAIC MODULES: GLOBAL PRODUCTION BY TYPE, THROUGH 2021 (MW) 87
TABLE 41 FORECAST-FUEL CELLS: GLOBAL REVENUES BY TYPE, THROUGH 2021 ($ MILLIONS) 88
TABLE 42 FORECAST-IMPLAN
TABLE DEVICES: REVENUES BY REGION, THROUGH 2021 ($ BILLIONS) 89
TABLE 43 FORECAST-WEAR AND CORROSION RESISTANT PARTS: GLOBAL REVENUES BY TYPE, THROUGH 2021 ($BILLIONS) 90
TABLE 44 THE NANOTECHNOLOGY INDUSTRY, 2016 94
TABLE 45 GLOBAL NANOTECHNOLOGY MARKET, BY SEGMENT, THROUGH 2021 ($ BILLIONS) 96
TABLE 46 GLOBAL ULTRATHIN FILM EQUIPMENT MARKET, BY APPLICATION, THROUGH 2021 ($ MILLIONS) 101
TABLE 47 FORECAST-ULTRATHIN FILM EQUIPMENT: GLOBAL REVENUES BY APPLICATION AND EQUIPMENT TYPE, 2021 ($ MILLIONS) 102
TABLE 48 FORECAST-ULTRATHIN FILM EQUIPMENT: GLOBAL REVENUES BY PROCESS, THROUGH 2021 ($ MILLIONS) 103
TABLE 49 FORECAST-ALD EQUIPMENT: GLOBAL REVENUES BY TYPE, THROUGH 2021 ($ MILLIONS) 105
TABLE 50 FORECAST-ULTRATHIN FILM EQUIPMENT: REVENUES, BY REGION, THROUGH 2021 ($ MILLIONS) 106
TABLE 51 LEADING SUPPLIERS OF ULTRATHIN FILM DEPOSITION EQUIPMENT, 2016 109
TABLE 52 LEADING SUPPLIERS OF ULTRATHIN FILM DEPOSITION EQUIPMENT, BY TYPE, 2016 111
TABLE 53 LEADING SUPPLIERS OF ULTRATHIN FILM DEPOSITION EQUIPMENT, BY TYPE AND REGION, 2016 113
TABLE 54 OTHER RELEVANT INDUSTRY PLAYERS, 2016 114
TABLE 55 ULTRATHIN FILM DEPOSITION PROCESSES: U.S. PATENTS, 2016 134
TABLE 56 ULTRATHIN FILM FABRICATION PROCESSES: U.S. PATENT TRENDS, THROUGH 2016 147
TABLE 57 ASSIGNEES OF U.S. PATENTS RELATED TO ULTRATHIN FILM FABRICATION PROCESSES, 2015-2016 151


LIST OF FIGURES

SUMMARY FIGURE GLOBAL ATOMIC LAYER DEPOSITION AND OTHER ULTRATHIN FILM FABRICATION PROCESSES MARKET, BY SEGMENT, 2014-2021 ($ MILLIONS) 11
FIGURE 1 THIN FILM METHODS (EQUIPMENT, MATERIALS, SERVICES): GLOBAL MARKET SHARE BY GROUP OF TECHNOLOGIES, 2016 (%) 14
FIGURE 2 ATOMIC LAYER DEPOSITION: GLOBAL PATENT APPLICATIONS AND PATENTS ISSUED, 1990-2015 (NO. OF PATENTS/APPLICATIONS) 16
FIGURE 3 GLOBAL ULTRATHIN FILM DEPOSITION TECHNOLOGIES MARKET, 2014-2021 ($ MILLIONS) 68
FIGURE 4 GLOBAL THIN FILM PROCESSES MARKET SHARE, BY MATERIAL, EQUIPMENT AND SERVICES, 2016 (%) 69
FIGURE 5 GLOBAL THIN FILM EQUIPMENT MARKET SHARE, BY PROCESS, 2016 (%) 71
FIGURE 6 GLOBAL ULTRATHIN FILM EQUIPMENT MARKET SHARE, BY PROCESS, 2016 (%) 73
FIGURE 7 GLOBAL ALD EQUIPMENT MARKET SHARE, BY TYPE, 2016 (%) 75
FIGURE 8 GLOBAL ULTRATHIN FILM EQUIPMENT MARKET SHARE, BY APPLICATION, 2016 (%) 76
FIGURE 9 GLOBAL ULTRATHIN FILM EQUIPMENT MARKET SHARE, BY REGION, 2016 (%) 78
FIGURE 10 FROM MICROELECTRONICS TO NANOELECTRONICS 92
FIGURE 11 GLOBAL NANOTECHNOLOGY MARKET SHARE, BY SEGMENT, 2021 (%) 96
FIGURE 12 GLOBAL ULTRATHIN FILM EQUIPMENT MARKET SHARE, BY APPLICATION, 2021 (%) 101
FIGURE 13 FORECAST - ULTRATHIN FILM EQUIPMENT: MARKET SHARE BY PROCESS, 2021 (%) 103
FIGURE 14 FORECAST-ALD EQUIPMENT MARKET SHARE, BY TYPE, 2021 (%) 105
FIGURE 15 FORECAST-ULTRATHIN FILM EQUIPMENT: MARKET SHARE BY REGION, 2021 (%) 106
FIGURE 16 ULTRATHIN FILM FABRICATION PROCESSES: U.S. PATENT TRENDS, 2014-2016 (NUMBER OF PATENTS) 147
FIGURE 17 ULTRATHIN FILM FABRICATION PROCESSES: PATENT SHARE, BY REGION, 2016 (%) 149
FIGURE 18 ULTRATHIN FILM FABRICATION PROCESSES: PATENT SHARE, BY COUNTRY, 2016 (%) 149
FIGURE 19 ULTRATHIN FILM FABRICATION PROCESSES: SHARES OF U.S. PATENTS BY ORGANIZATION TYPE, 2016 (%) 153
FIGURE 20 ULTRATHIN FILM FABRICATION PROCESSES: SHARES OF U.S. PATENTS BY CATEGORY, 2016 (%) 155
FIGURE 21 ULTRATHIN FILM FABRICATION PROCESSES: SHARES OF U.S. PATENTS, BY APPLICATION, 2016 (%) 157
FIGURE 22 ULTRATHIN FILM FABRICATION PROCESSES: SHARES OF U.S. PATENTS, BY PROCESS TYPE, 2016 (%) 158
Country=World Industry=ElectronicsManufacturing ParentIndustry=Manufacturing Date=201611 Topic=MarketReport Publisher=BCCResearch Price=6000